IRESS ControllerReactive Sputtering, Inc. offers a reactive sputtering controller that will enable the user to reactively deposit many compound films from an elemental target, allowing the process to achieve increased flexibility, repeatability, reliability, and throughput. By precisely controlling the partial pressure of the reactive gas through the application of nested control loops, IRESS helps the user to control such variables as hardness, color, optical constants, electrical, and thermal properties. Repeatability is ensured with proprietary calibration routines including hysteresis curve generation, as well as techniques to eliminate long term control signal drift.
This system is controlled from a host PC with a Program written for this express purpose. I provides: